Advanced Computerized Control System
(ACCS)

By replacing the original Microprocessor Control Module with current PC technology and sophisticated software, Theis Enterprises has rejuvenated many otherwise proven etch tools.  Real time data gathering, faster throughput, and greater yield are just a few of the new advancements that make up an etcher with a new Digital Controller. Troubleshooting, fault logging, network capabilities and best of all, affordable price are additional reasons why it makes sense to operate a plasma etch system with ACCS Control.

The ACCS controller can be retrofitted to the 90X systems and adapted to virtually every process equipment in the industry. 

In 2004, we passed the one millionth wafer mark, processed on tools equipped with our ACCS control system.