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901e /903e
Etchers
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ACCS Digital
Control System
- Oxide (903e) or Poly/Nitride (901e) Etchers
- Standalone, Tabletops
- Wafer Sizes 3" to 6"
- 600W / 1000W Generators
- 4 Etchant Gases
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915 / 965 Batch Etchers
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Faster and More
Accurate Control
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Endpointing in Real
Time On Screen
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Wafer Tracking and
Recording
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Operator Friendly
Inputs
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490/590 Etchers
- Poly (490) or Oxide (590) Etch
- Wafer Sizes 4" to 6"
- Stepper Arm Drives
- 650W / 1200W Generators
- Vacuum Loadlocks
- 5 Etchant Gases
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4420/4520/4520i Etchers
- 4420 (Poly / Nitride) & 4520 (Oxide)
- Through the Wall
- 8 Etchant Gases
- 600W / 1200 W Generators
- 6" or 8" Wafer Size
- R.F. Matching / LoFAT Matching Network
- Mechanical Clamping or Electrostatic Chuck
- Isotropic Module [4520i]
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9600 Metal Etchers
Please contact us for further
information
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Theis ICP Etcher
- PC BASED CONTROLLER (ACCS)
- TABLE TOP LOW COST TOOL
- ETCH / ASH RATES: UP TO 10 MICRONS PER MINUTE
- MUCH BETTER UNIFORMITY THAN MICROWAVE
- LOW PLASMA DAMAGE POTENTIAL
- ICP + RIE DUAL ETCH 6kW / 600W
- LOW TEMP OPERATION: LT 80C
- APPLICATIONS:
- PHOTORESIST STRIP
- SU- 8 REMOVAL
- CROSS-LINKED POLYIMIDE ETCH
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