Spare Parts: We stock replacement parts and most consumable items for etchers, from the 90Xe series, 490/590 series to the 4420/4520 series. Prompt shipment, both domestic and abroad, is guaranteed. Our parts, having been thoroughly inspected, meet or exceed the original specifications.

Field Service: Our Engineers are factory trained and experienced in repairing and maintaining Plasma Etchers/Strippers, and are available for installations, troubleshooting and evaluations on a limited basis.

Module Repair: Our Service Department has 15 years of experience in repairing dry plasma etcher modules and peripherals, such as:

• RF Matching Networks
• RF Generators
• Chillers
• PC Boards

Turnaround time for PCB repairs averages 72 hours. Thorough testing, after repairs are competed, ensures proper operation upon installation.

Test Production: We invite customers interested in purchasing our plasma systems to bring or send their wafers to us for process verification before purchase. After sale and installation, the system is recalibrated and brought on-line by our Services Engineers. All equipment is warranted for parts and labor for a minimum of 6 months. Extended warranties can be purchased.

Training Classes: We offer training on various  machines, averaging 5 days and meeting in our Tempe offices or at customer facilities. All materials, test equipment and systems for hands-on line maintenance training are provided.  Please call for more details.